Nano-scale 3-D Characterization of Materials Using FIB-SEM
نویسندگان
چکیده
منابع مشابه
Controlling the Dimensions of Nano-structured Materials Using Fib Sem
Techniques for characterization and methods for fabrication at the nano-scale are becoming more powerful, giving new insights into the spatial relationships between nanostructures and greater control over their development. A case in point is the application of state-of-the-art focused ion beam technology (FIB), in combination with high-performance scanning electron microscopy (SEM), giving the...
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Nanomanipulators, whilst commonly used to lift out TEM samples prepared in the FIB, have a number of other potential applications and can aid in the chemical and crystallographic analysis of samples. Here, we discuss some of these alternative uses of nanomanipulators and show how they enable the EDS and EBSD analysis of thin samples in the FIB-SEM as well as serve as electrical probes and enabl...
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Recently, flip-chip assembly has become mainstream for fine-pitch interconnection in large-scale integration packages. Gold studs and copper pillars with solder caps are two types of bumps in common use.[1] Gold stud bumps are commonly used for interconnecting dice with peripheral layouts. Gold-gold bonding has the advantage of a low process temperature, and gold-solder with adhesive has good w...
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The Nanorobotics series developed by Klocke Nanotechnik extend Scanning Electron or Ion Microscopes to material processing systems. The included automation allows the whole field of handling, assembly and manufacturing like known from a normal desktop system – now with nano-precision, including various kinds of image generation by using different sensors. Applications are in the field of Materi...
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This paper presents a technique to expose and characterize nano-structured hole arrays in tapered photonic crystal fibers. Hole array structures are examined with taper outer diameters ranging from 12.9 microm to 1.6 microm. A combined focused ion beam milling and scanning electron microscope system was used to expose and characterize the arrayed air-silica structures. Results from this combine...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2006
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927606068656